Research Article
Enhancing Physical Properties: Chromium-Doped Zinc Oxide Thin Films Deposited
by Ultrasonic Spray Pyrolysis
2023
2
2
62-70
31.08.2023
2822-4566
Ibrahim GUNES
Emrah SARICA
Vildan BILGIN
In this study, undoped and different concentrations (3%, 6%, and 9%) of chromium-doped ZnO thin films
were deposited using the ultrasonic spray pyrolysis technique, and the significant effects of the dopant
concentration on the physical properties of the deposited films, including structural, morphological, and
electrical characteristics, were investigated. The structural analysis revealed that the thin films possessed a
hexagonal wurtzite structure, and the intensity of the peak corresponding to the (002) plane initially
increased with the increasing dopant concentration, then decreased, and increased again. Morphological
analysis showed that there were no regular changes in the crystal sizes with increasing dopant concentration,
but noticeable alterations occurred on the film surfaces. The optical band gaps of the deposited films
increased from 3.24 eV to 3.31 eV with the increasing dopant concentration. The electrical resistivity values
of the films varied between 3.04x101 Ωcm and 3.35x106 Ωcm, indicating that higher dopant concentrations
led to an increase in resistivity
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